Non-contact Thickness Meter
CL-7100 series List Controls
The CL-7100 series, which was introduced as a successor to the long-selling CL-5610 series, has greatly enhanced measurement accuracy and response performance. It also has new features such as temperature measurement and Ethernet communication. Compatible with various materials such as silicon wafers, electrical steel sheets, and EV battery films, combined with a wide range of displacement sensors, it achieves high-precision thickness measurement and efficient inspection processes.
Features
Non-contact measurement
It achieves high reproducibility without physically affecting the object being measured.
High accuracy and high response measurement performance
Supports high-precision measurement with accuracy of ±0.05 to ±0.12% FS (depending on sensors). The update cycle has been reduced from 20 ms to 10 ms. Effective for multi-point measurement and high-speed lines.
Temperature measurement/correction functions, Ethernet (option)
Environmental temperature measurement using the PT-100 temperature sensor and temperature correction are available. By acquiring temperature data simultaneously with thickness measurement, measurement errors caused by temperature variations are compensated, achieving higher-precision measurement. In addtion, remote monitoring and centralized data management are also available via Ethernet communication.
Equipped with a large color LCD touch panel to offer both visibility and intuitive operations
The intuitive menu display allows up to four measurement data items to be shown on a single screen. It also supports hard key operation, enabling use even while wearing gloves.
Compact, lightweight and low power consumption
Approximately 50% smaller and lighter than existing models. Its low-power consumption design reduces environmental impact.
Comparator function (with CL-0731 or CL-0732 option): real-time monitoring of abnormal values
| Measurement targets |
Conductors/Semiconductors |
Insulators |
|---|---|---|
| Items that require cleanliness, such as silicon wafers, steel plates, aluminum plates, hard disks, printed circuit boards, and other metal sheets, as well as soft materials, mirror-finished surfaces, and items that are easily scratched. | Plastics such as glass, polyethylene, and polypropylene. (Thin items made of a single material with uniform properties throughout) |
*For measurements of intermediate materials or composite materials in addition to the above-mentioned objects, please contact us.
System configurations
Connection method
When measuring conductors or semiconductors
Arrange two sensors and the measurement object in parallel within the measurement range, and set the sensor gap value (Gs) in the CL-7100 Series. The measurement object is installed between sensors A or B, and the gap value (Ga, Gb) between each sensor and the measurement object is measured, and the thickness (t) can be obtained.
When measuring insulators
(CL-0300 Insulator Measurement function)
Install the sensor and the conductor (reference floor) in parallel, and set the sensor voltage output value (Gs) in the CL-7100 series. When the measurement object is inserted between the sensor and the conductor (reference floor), the sensor voltage output becomes Ga, and the thickness (t) is obtained from this change in sensor voltage and the relative permittivity εr.
Measurement examples
Specifications
| Measurement items | Thickness: Thickness of the measurement target (conductors/ semiconductors/insulators*) *when CL-0740 installed | ||
| Gap A：Gap between Sensor A and the measurement target (conductors/semiconductors only) | |||
| Gap B：Gap between Sensor B and the measurement target (conductors/semiconductors only) | |||
| A-B：Height difference/parallelism (A-B) (conductors/semiconductors only) | |||
| Temperature：Temperature * when CL-0741 installd | |||
| Compatible sensor/Resolution | Sensor | Resolution | |
| Standard | VE-2011/VE-5011/VE-1021 VE-5010/VE-1020 |
0.1 µm | |
| VE-1520 | 0.5 µm | ||
| VE-3020 VE-8020/VE-8021 |
1.0 µm | ||
| High resolution (when CL-0720 (option) installed) | VE-2011 | 0.02 µm | |
| VE-5010/ VE-5011 | 0.05 µm *when CL-0722 installed: 0.02µm |
||
| VE-1020/ VE-1021 | 0.1 µm | ||
| VE-1520 | 0.2 µm | ||
| VE-3020 VE-8020/VE-8021 |
0.5 µm | ||
| Measurement accuracy | Sensor | Accuracy | |
| Standard | VE-5010/VE-1020/VE-1520/VE-3020/VE-8020/ VE-2011/VE-5011/VE-1021/VE-8021 |
± 0.15 % FS | |
| High resolution (when CL-0720 (option) installed) | VE-2011 | ± 0.12 % FS | |
| VE-5010/VE-5011 | ± 0.10 % FS | ||
| VE-1020/VE-1021/VE-1520/VE-3020/VE-8020/ VE-8021 |
± 0.05 % FS | ||
| Temperature characteristics | Within ±0.5 % FS/°C Reference temperature: 23 °C |
||
| Sensor input cable | VL-1520(1.5 ｍ, both ends straight connector) / VL-1521(1.5 m, L type⇔Straight connector) | ||
| Display | 4.3 inch touch panel LCD (up to 4 items display) | ||
| Remote signal input/output | Input/output method | Input | Open collector |
| Output | 1 make contact output | ||
| Function | Input signal | START/STOP/PAUSE/CALIB | |
| Output signal | •Select from [Status] and [Error] •+5 V voltage output |
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| Compatible connector | ER03-PB8M-T manufactured by Tajimi Electronics | ||
| Interface | RS-232C, Ethernet (option, CL-0751) | ||
| General specifications | Power supply | 100 to 240 VAC ±10 %, 50/60 Hz, Power consumption: 36 VA or less | |
| Outer dimension | 210(W) × 99(H) × 150(D) mm (excluding protrusions) | ||
| Weight | Approx. 1.6 kg | ||
| Operating temperature range | 0 ℃ to 40 ℃ | ||
| Storage temperature range | –10 ℃ to 50 ℃ | ||
| Operating humidity range | 20 % to 85 % （no condensation） | ||
| Storage humidity range | 20 % to 85 % （no condensation） | ||
| Warm-up time | At least 40 minutes | ||
| Electric shock protection class | Ⅰ(3 pin) | ||
| Overvoltage category | Ⅱ | ||
| Operating environment | • Outdoor use (laboratory/factory) | ||
| • Use at an altitude of up to 2,000 m | |||
| • Contamination level: 2 | |||
| Comforming to standards | RoHS Directive | 2011/65/EU Standard：EN IEC 63000 |
|
| Low Voltage Directive | EN 61010-1 | ||
| Accessories | • AC power cable • Remote connector（made by Tajimi：ER03-PB8M） • Instruction manual |
||
| Accessories for CL-7100S | CL-0710 Sensor amplifier | Outer dimension | 81(W) mm × 48(H) mm × 35(D) mm(excluding protrusions) |
| Weight | Approx. 210 g | ||
| Dedicated cable (2.5 m) * up to 10 m (option) | |||
Options
CL-0720 High-resolution Measurement Function
This option improves display resolution and calculation accuracy.
CL-0721 High-impedance Grounding Mode
This option ensures stable measurement even in an environment where the ground resistance is large or unstable.
CL-0722 Measurement Range Change Function
This option changes the measurement range of VE-5010/ VE-5011.
CL-0730 Analog Output Function
| Number of outputs | 3 | ||
| Output items | Select from [Thickness], [Gap A], [Gap B], [A-B], and [Temperature] • Deviation selectable |
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| Output range | ± 5 V | ||
| Load resitance | 100 kΩ or more | ||
| Accuracy (linearity) | Within ± 0.2 % FS | ||
| Update cycle | 10 ms *Effective only for the first Gap A/Gap B moving average setting: 0.1 ms |
||
| Compatible connector | C02 type （BNC） | ||
CL-0731 Comparator Output Function
| Number of outputs | 3 | ||
| Output method | 1 make contact output | ||
| Contact capacity | Max. 60 VAC/DC, Max. 400 mA (resistance load) | ||
| Operation mode | Select from separate/link mode | ||
| Separate mode | Measurement items and upper and lower limits can be set separately for each port. | ||
| Link mode | •Port 1 is open when the measured value is above the upper limit. •Port 2 is open when the measured value is between the upper and lower limits. •Port 3 is open when the measured value is below the lower limit. |
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| Output items | Separate mode | Select from OFF/Thickness/Gap A/Gap B/A-B/Error | |
| Link mode | Select from OFF/Thickness/Gap A/Gap B/A-B | ||
| Judgment interval | 10 ms | ||
| Compatible connector | MC 1,5/6-STF-3,81–1827745（made by Phoenix Contact ） | ||
CL-0732 Analog and Comparator Output Function
This option allows the simultaneous use of the analog output and comparator output functions.
CL-0740 Insulator Measurement Function
This option enables thickness measurement of insulators.
CL-0741 Temperature Measurement Function
| Supported sensor | Resistance temperature detector (Pt 100), 3-wire bridge type | ||
| Measurement range | 0 ℃ to 200 ℃ | ||
| Display resolution | 0.1 ℃ | ||
| Measurement accuracy | ± 0.3 % FS (excluding sensor accuracy) | ||
| Update cycle | 200 ms or less | ||
| Exciting current | Approx. 1 mA | ||
| Compatible connector | M4 screw terminal connection | ||
CL-0750 BCD Output Function
| Output method | 6-digit parallel BCD, open collector | ||
| Output items | • Measurement items: Thickness/Gap A/Gap B/A-B • Calculation: Real/Max/Min/Range • Deviation: OFF/ON Select a combination of the above or Display 1, 2, 3, or 4 |
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| Output update cycle | 10 ms | ||
| Compatible connector | HDRA-E36MA （manufactured by Honda Tsushin Kogyo） | ||
| Applicable cable | AA-8207（3 m/one end open） | ||
CL-0751 Ethernet Connectivity Function
| Transmission system | Automatic selection of 10BASE-T/100BASE-TX | ||
| Communication protocol | TCP/IP(IPv4) | ||
| Electrical specifications | compliance with IEEE802.3 | ||
| Function | Command control and data transmission (socket communication) using a dedicated port | ||
| Compatible connector | RJ-45 | ||
CL-015 Wafer Slide Table made to order
The CL-015 is a simple manual slide table designed for non-contact thickness measurement of semiconductor and conductor wafers, such as silicon wafers, combining by it with the CL-7100 and a VE sensor (holding section ⌀10). To make it easier to use a vacuum suction tweezer, grooves are provided on the surface plate where the wafer is placed.
CL-015 Wafer Slide Table (made to order)
Applicable wafer outer diameter: 100 to 150 mm, thickness: 0.1 to 1 mm Additionally, customized tables can be made or 200 mm, 300 mm, etc.
VE series Electrostatic Capacitance type Gap Detector
Standard type
| Model name | VE-5010 | VE-1020 | VE-1520 | VE-3020 | VE-8020 |
|---|---|---|---|---|---|
| Measurement range(μm)*1 | 50 to 500 | 100 to 1000 | 150 to 1500 | 300 to 3000 | 800 to 8000 |
| Measurement diameter (mm)*2 | ⌀6 | ⌀8 | ⌀10 | ⌀20 | ⌀40 |
| Cable length | 1.5 m (attached cable provided as standard) | VL-1520/1521 cable(1.5 m), sold separately | |||
| Operating temperature range*3 | 0 to + 80 ℃ | ||||
⌀10 mm Clamp shape type
| Model name | VE-2011 | VE-5011 | VE-1021 | VE-8021 |
|---|---|---|---|---|
| Measurement range(μm)*1 | 20 to 200 | 50 to 500 | 100 to 1000 | 800 to 8000 |
| Measurement diameter(mm)*2 | ⌀3 | ⌀6 | ⌀8 | ⌀40 |
| Cable length | VL-1520/1521 cable (1.5 m), sold separately | |||
| Operating temperature range*3 | 0 to +80 ℃ | |||
*1 The measurement range indicates the maximum gap between the sensor end face and the measurement target.
*2 The measurement surface of the target must be larger than the outer diameter of the sensor.
*3 The operating temperature range indicates the temperature range in which the sensor can operate. It does not guarantee linearity.
To ensure linearity, use the sensor at a temperature of +23 °C ±2 °C.
Signal cables
| ●VL-1520 Cable length: 1.5 m (Both ends straight connector) |
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|---|---|
| ●VL-1521 Cable length: 1.5 m (L-shpae type - straight connector) |
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Related information
Revised:2025/12/22