What is the reproducibility of measurement value for the Non-contact Thickness/Displacement Meter?
The silicon wafer thickness measurement example of the CL-5600 series Thickness Meter is shown in the following figure. You can obtain good measurement reproducibility with fixing a sample tightly. Generally, in the case for the silicon wafer, fixed on the measurement table using the sucked air.
| Model name |
|
|---|---|
| Measurement sample | Silicon wafer (5 pieces) |
| Measurement point | Central wafer |
CL-015 Wafer slide table
(optional vacuum sucking mechanism is included)
Revised:2011/04/18
