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Non-contact Thickness Meter

CL-5610 series

Electrostatic capacitance-type

Photo (CL-5600 series Non-contact Thickness Meter)

The CL-5610/5610S is used to perform non-contact thickness measurement of  objects under measurement including conductors, semiconductors and insulators in combination with the new-developed VE series capacitance type gap detector. The CL-5610/5610S can be connected up to 2 gap detectors and also used as 2-ch displacement meter.

 

The CL-5610 has a built-in amplifier for a sensor and can be used to connect with the VE sensor directly. This model is effective for off-line measurement on a desktop PC. (The cable length between sensor and a main unit is 1.5 m, cannot be extended.)

 

The CL-5610S can be used away from the VE sensor through an external amplifier. The cable length between a main unit and an external amplifier is 2.5 m as standard, up to 10-m extension as an option. It is suitable when the main unit of the thickness meter is set up separately from a sensor such as installation to the other equipment.

Features

  • Wide range of measurement items

Both thickness and gap measurements can be performed. DEVI (deviation value), MAX (maximum value), MIN (minimum value), or Range (MAX-MIN from calculation start time) can be selected for each measurement item.

  • Performs thickness measurement of conductors, semiconductors and insulators (option) with a single unit

When the CL-0300 optional Insulator Measurement Function is installed, the CL-5610/5610S allows measurement of insulators such as thin plastic film or glass sheet.

*Compound materials cannot be measured.
*Some materials cannot be measured because of their relative permittivity.

  • Enables stable thickness measurement of an object with smaller contact area

At measurement of an object on a table coated with fluorine film, the large contact area has been required for stable measurement. The CL-0210 High-impedance Grounding Mode (option) enables measurement of an object with small contact area even if the contact area is smaller than the table. The larger the contact area is, the more the stable measurement can be performed.

  • The High-resolution Measurement Function (CL-0200 option) enables displaying a minimum resolution at 0.02μm＊1.

*1: When the VE-2011/5010/5011 is used. The VE-5010/5011 is available when the measurement range is changed from 20 to 200 by using the optional CL-0201.

 

  • Storing of up to 6 calibration informations for sensors.

The CL-5610 series can store up to 6 calibration informations for sensors to select suitable sensor depending on a measurement range and resolution.

  • Control or data transmission can be performed remotely from PLC* or PC.

Remote, RS-232C, and BCD (option) connectors are provided as external interfaces. Control or data transmission can be performed remotely when the CL-5610 series is incorporated in production facility. Measurement data in BCD format can be obtained from BCD output connector at every 20 ms. Also optional the CL-0110 Outputs Function enables output of measurement value with analog voltage.

* PLC: Programmable Logic Controller

  • Online monitoring of abnormal value can be performed by the Comparator Function. (When the CL-0100 Outputs Function is installed.)

Measurable objects

Conductors or semiconductors

Insulators

Silicon wafer, steel plate, copper-foil substrate, hard disc, aluminum stainless steel, electronic printed wiring board, flexible material, mirrored material, easily damaged material, and any other materials required to be clean including metal plate.

Glass, polyethylene, polypropylene and other plastic (Thin objects composed of a uniform and simple material throughout can be measured.)

Please contact your nearest distributor or send an e-mail to us (overseas@ONO SOKKI.co.jp) about measurement of intermediate material, compound material or other materials.

Measurement method

When measuring conductors or semiconductors

When measuring insulators
(CL-0300 Insulator Measurement function)

 

Note: The sensor case and the measurement object are assumed to have equal potential.

Two sensors are arranged in parallel with a gap (Gs) (calibrated in advance) formed between them and then the gap value is set in the counter. A target measurement object is installed between sensors A and B, and a gap value for each sensor (Ga / Gb) is measured. Then, the thickness (t) of the target measurement object can be measured by subtracting the gap value from the setting in the counter.

Illustration (Measurement method when measuring insulators)

 

Note: The sensor case and the opposing conductor (reference area) are assumed to have equal potential.

Specify the space (Gs) between the sensor and the conductor (reference area) at the CL-5610 series. When the target measurement object is inserted between the sensor and the conductor (reference area), the sensor output becomes Ga. The thickness (t) is obtained from the amount of change in the sensor output and the relative dielectric constant εr.

εr:Dielectric constant
(When the dielectric constant of a vacuum is 1 the dielectric constant of the target measurement object is referred to as the relative dielectric constant.)

Measurement examples

<Click here>

Overview Specificationss

Measurable objects Conductors, semiconductors, insulators*1
Sensor input 2-channel (A, B) capacitance type gap detector

Measurement parameters
  • Thickness of an object under measurement (conductor, semiconductor, insulator <option: CL-0300>)
  • Gap A between sensor A and an object under measurement (conductors, semiconductors)
  • Gap B between sensor B and an object under measurement (conductors, semiconductors)
  • Difference between A and B (A-B)
Display mode
  • ABS: Displaying absolute values of thickness or gap
  • DEVI: Displaying difference of between measurement value and set measurement reference value
  • Displaying Maximum (MAX), Minimum (MIN), Maximum – Minimum (RANGE) values from start of calculation.

Applicable sensor / display resolution

The display resolution when used in combination with the new VE Series Electrostatic Capacitance type Gap Detectors is as follows.

Sensor Measurement range (μm) Display resolution (μm)
Standard When the optional CL-0200 High-resolution Measurement Function is installed.
VE-2011 20 to 200 0.1 0.02
VE-5010 50 to 500
20 to 200＊1		 0.1 0.05/0.02＊1
VE-5011
VE-1020 100 to 1000 0.1 0.1
VE-1021
VE-1520 150 to 1500 0.5 0.2
VE-3020 300 to 3000 1 0.5
VE-3021
(Discontinued)
VE-8020 800 to 8000 2 1
VE-8021

*1: The measurement range of the VE-5010/5011 can be specified of the measurement range from 20 to 200 μm by installing the optional CL-0201. The display resolution is 0.02 μm when the high-resolution measurement option is installed.

Accuracy ±0.15 % FS(standard)
±0.12 % FS(When the optional CL-0200 High-resolution Measurement Function is installed. <not including the VE-8020/8021>)
Guaranteed accuracy temperature range +23 to ±2 °C
Display Fluorescent display tube
Display of measurement results can be selected from 1 kind (SINGLE, 1-line) or 2 kinds (DUAL, 2-line).
Parameter setting

Parameter required for measurement/calculation can be set up in an internal memory by the each key on a panel. These setup values are stored and recalled at the time of restart.
Sampling time

20 ms
Averaging Moving average:1 to 64 times
Interface RS-232C:Remote control of a main unit and transmission of measurement data. The measurement data can be printed to the DPU-414 printer (sold separately)
BCD output function (option:CL-0120)

Outputs any measurement result in BCD format with 6-digit parallel.
Output method: Open collector
Output data: Display value can be selected from GAP-A, GAP-B, THICK, A-B, and DISP2.
Data update time: 20 ms
Connection cable: AA-8207 (3 m, top end open)
Remote function

Remote operation of stop/start calculation, thickness calibration from external.

■ Remote terminals
   Pin assignment and input/output signals
A Power supply 5 to 24 VDC
When supplying at 6 VDC or higher from external, insert a resistor.
B START Same function as the START key
C STOP Deactivates the calculation mode.
D PAUSE Same function as the PAUSE key.
E CALIB Calibration using data of reference piece of object under measurement registered.
 ・Enabled only in conductor measurement.
 ・Thickness of the reference piece of object under measurement cannot be changed.
F START STATUS Activated in the calculation mode and calculation suspend mode.
G COMMON Connects at 0 V
H +5V output Outputs at +5V (MAX:0.4 A)

*Applicable connector: R03-PB8M (TAJIMI ELECTRONICS CO., LTD)
SYNC function

The multiple CL-5610/5610S units can be performed with synchronized operation

Power requirement

100 to 240 VAC 50/60 Hz

Operating environment (main unit only)

 Temperature:+23 to ±2 °C (with a guaranteed accuracy range), 0 to+40°C  (operating range)

Humidity:20 to 80 %R.H.(with no condensation)

Outer Dimensions

210(W)×99(H)×276(D)mm (CL-5610/5610S main unit)
42.4(W)× 56(H)120(D)mm (Converter for CL-5610S)

Weight

Approx. 4.5 kg (CL-5610/5610S main unit)
Approx 0.6 kg × 2 (Converter for CL-5610S)

Option

CL-0110 Outputs Function (Analog output, comparator output)

Analog output The number of terminals:3 (SENSOR A, SENSOR B, A-OUT)

●SENSOR A, SENSOR B
Output items:Outputs gap value of SENSOR A or SENSOR B.
Output voltage:5 V/F.S.(with [-5 to 0 V] offset function)
Output accuracy:±0.25 % FS(Accuracy is guaranteed only for one sensor A or B).
Response frequency: DC to 4 kHz

●A-OUT
Output items:Selectable from THICK, GAP A, GAP B or A-B
Output voltage:-5 to 0 to +5 V
Output accuracy:±0.25 %/F.S
Output update time: 20 ms
Comparator Function

 

The number of outputs:3 (COMP1, COMP2, COMP3)
Output method: Open collector output
Setup value:Upper-limit or lower-limit value
Mode: Individual mode or ALL mode
●Individual mode: Using comparator 1/2/3 independently

Illustration (CL-0110 comparator operation)

The comparator contact output closes if condition “Upper-limit setting (UPPER) < Measurement value” or “Lower-limit setting (LOWER) > Measurement value” is satisfied.

 ●ALL mode: Using comparator 1/2/3 for judgment of UPPER/OK/LOWER.

CL-0120 BCD Output Function

Output method 6-digit parallel, BCD, open collector output
Output items Selectable from THICK, GAP-A, GAP-B. A-B, or DISP 2
Data update time 20 ms
Applicable cable AA-8207 (3 m, top end open)

CL-0200 High-resolution Measurement Function

  The CL-0200 High-resolution Measurement Function improves the resolution and linearity of the VE series.

CL-0210 High-impedance Grounding Mode

  Measurement can be performed stably under the condition with great grounding resistance.

CL-0300 Insulator Measurement Function

  When the CL-0300 optional Insulator Measurement Function is installed, the CL-5610/5610S allows measurement of insulators.

CL-015 Wafer slide table (made to order)

Photo (CL-015 Wafer slide table)

 The CL-015 is a manual slide table that can be used together with the CL-5610/5610S and VE-1520 Gap Detectors to perform non-contact thickness measurement of semiconductors or conductors such as silicon wafers. Grooves have been provided in the table surface to facilitate the use of vacuum adsorption tweezers.

Compatible wafer size: Diameter 100 to 150 mm
                                      Thickness 0.1 to 1 mm

Note: Other special tables for 200-mm and 300-mm wafers can also be made to order.

VE series Electrostatic Capacitance type Gap Detector

Standard type

Model name VE-5010 VE-1020 VE-1520 VE-3020 VE-8020
Measurement range(μm) 50 to 500 100 to 1000 150 to 1500 300 to 3000 800 to 8000
Measurement diameter (mm)*1 φ6 φ8 φ10 φ20 φ40
Cable length 1.5 m (attached cable provided as standard) VL-1520/1521 cable(1.5m)(sold separately)
Temperature function k1＝1.7×10-5, k2＝3.4×10-5
Operating temperature range *2 0 to +80 °C

φ10mm Clamp shape type

Model name VE-2011 VE-5011 VE-1021 VE-3021
(Discontinued) 		VE-8021
Measurement range(μm) 20 to 200 50 to 500 100 to 1000 300 to 3000 800 to 8000
Measurement diameter(mm)*1 φ3 φ6 φ8 φ20 φ40
Cable length VL-1520/1521 cable (1.5m), (sold separately)
Temperature function k1＝1.7×10-5, k2＝3.4×10-5
Operating temperature range *2 0 to +80 °C

*1 The surface measurement area of the object under measurement must be larger than the external diameter of the sensor.
*2 The operating temperature range is the temperature range in which the sensor can operate, not the operating range for which accuracy is guaranteed. The operating range for which accuracy is guaranteed is at 23 ±2 °C.

CL-0201 Measurement Range Change option for the VE-5010/5011

  The measurement range of the VE-5010/5011 can be changed from 20 to 200 μm by using the optional CL-0201.

Signal cables (sold separately)

VL-1520 (straight --- straight) Illustration (VL-1520 signal cable)
VL-1521 (right-angle --- straight ) Illustration (VL-1521 signal cable)

Revised:2010/12/01


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