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Non-contact Thickness Meter
CL-5610 series
Electrostatic
capacitance-type |
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The
CL-5610/5610S is used to perform non-contact thickness
measurement of objects under measurement including
conductors, semiconductors and insulators in combination
with the new-developed VE series capacitance type gap
detector. The CL-5610/5610S can be connected up to 2 gap
detectors and also used as 2-ch displacement meter.
The CL-5610 has a built-in amplifier for a sensor and
can be used to connect with the VE sensor directly. This
model is effective for off-line measurement on a desktop
PC. (The cable length between sensor and a main unit is
1.5 m, cannot be extended.)
The CL-5610S can be used away from the VE sensor
through an external amplifier. The cable length between
a main unit and an external amplifier is 2.5 m as
standard, up to 10-m extension as an option. It is
suitable when the main unit of the thickness meter is
set up separately from a sensor such as installation to
the other equipment. |
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Features
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Both thickness and gap measurements can be performed. DEVI
(deviation value), MAX (maximum value), MIN (minimum value), or
Range (MAX-MIN from calculation start time) can be selected for
each measurement item.
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When the CL-0300 optional Insulator
Measurement Function is installed, the CL-5610/5610S allows
measurement of insulators such as thin plastic film or glass
sheet.
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*Compound materials cannot be measured.
*Some materials cannot be measured because of their relative
permittivity.
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At measurement of an object on a table coated with fluorine
film, the large contact area has been required for stable
measurement. The CL-0210 High-impedance Grounding Mode (option)
enables measurement of an object with small contact area even if
the contact area is smaller than the table. The larger the
contact area is, the more the stable measurement can be
performed.
*1: When the VE-2011/5010/5011 is used. The
VE-5010/5011 is available when the measurement range is changed
from 20 to 200 by using the optional CL-0201.
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The CL-5610 series can store up to 6
calibration informations for sensors to select suitable sensor
depending on a measurement range and resolution.
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Remote, RS-232C, and BCD (option)
connectors are provided as external interfaces. Control or data
transmission can be performed remotely when the CL-5610 series
is incorporated in production facility. Measurement data in BCD
format can be obtained from BCD output connector at every 20 ms.
Also optional the CL-0110 Outputs Function enables output of
measurement value with analog voltage.
* PLC: Programmable Logic Controller
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Measurable
objects |
Conductors or semiconductors |
Insulators |
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Silicon wafer, steel plate, copper-foil
substrate, hard disc, aluminum stainless steel,
electronic printed wiring board, flexible material,
mirrored material, easily damaged material, and any
other materials required to be clean including metal
plate. |
Glass, polyethylene,
polypropylene and other plastic (Thin objects composed
of a uniform and simple material throughout can be
measured.) |
Measurement method
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When measuring conductors or semiconductors |
When
measuring insulators
(CL-0300 Insulator Measurement function) |
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Note: The sensor case
and the measurement object are assumed to have
equal potential.
Two sensors
are arranged in parallel with a gap (Gs) (calibrated in
advance) formed between them and then the gap value is
set in the counter. A target measurement object is
installed between sensors A and B, and a gap value for
each sensor (Ga / Gb) is measured. Then, the thickness
(t) of the target measurement object can be measured by
subtracting the gap value from the setting in the
counter.
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Note: The sensor case
and the opposing conductor (reference area) are
assumed to have equal potential.
Specify the space (Gs) between the
sensor and the conductor (reference area) at the CL-5610
series. When the target measurement object is inserted
between the sensor and the conductor (reference area),
the sensor output becomes Ga. The thickness (t) is
obtained from the amount of change in the sensor output
and the relative dielectric constant εr.
εr：Dielectric
constant
(When the dielectric constant of a vacuum is 1 the
dielectric constant of the target measurement object is
referred to as the relative dielectric constant.)
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Measurement examples
<Click here>
Overview Specifications
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Measurable objects |
Conductors, semiconductors, insulators*1 |
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Sensor input |
2-channel (A, B) capacitance type gap detector |
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Measurement parameters |
- Thickness of an object under measurement (conductor,
semiconductor, insulator <option: CL-0300>)
- Gap A between sensor A and an object under
measurement (conductors, semiconductors)
- Gap B between sensor B and an object under
measurement (conductors, semiconductors)
- Difference between A and B (A-B)
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Display mode |
- ABS: Displaying absolute values of thickness or gap
- DEVI: Displaying difference of between measurement
value and set measurement reference value
- Displaying Maximum (MAX), Minimum (MIN), Maximum
– Minimum (RANGE) values from start of calculation.
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Applicable
sensor / display resolution |
The display resolution when used in
combination with the new VE Series Electrostatic
Capacitance type Gap Detectors is as follows.
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Sensor |
Measurement range
（μm） |
Display resolution
（μm） |
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Standard |
When the optional
CL-0200 High-resolution Measurement Function
is installed. |
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VE-2011 |
20 to 200 |
0.1 |
0.02 |
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VE-5010 |
50 to 500
20 to 200＊1 |
0.1 |
0.05/0.02＊1 |
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VE-5011 |
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VE-1020 |
100 to 1000 |
0.1 |
0.1 |
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VE-1021 |
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VE-1520 |
150 to 1500 |
0.5 |
0.2 |
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VE-3020 |
300 to 3000 |
1 |
0.5 |
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VE-3021 |
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VE-8020 |
800 to 8000 |
2 |
1 |
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VE-8021 |
*1: The measurement range of the
VE-5010/5011 can be specified of the measurement
range from 20 to 200 μm by installing the optional
CL-0201. The display resolution is 0.02 μm when the
high-resolution measurement option is installed.
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Accuracy |
±0.15 %/F.S.(standard)
±0.12 %/F.S.(When the optional CL-0200 High-resolution
Measurement Function is installed. <not including the
VE-8020/8021>) |
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Guaranteed accuracy temperature
range |
＋23 to ±2 °C |
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Display |
Fluorescent display tube
Display of measurement results can be selected from 1
kind (SINGLE, 1-line) or 2 kinds (DUAL, 2-line). |
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Parameter setting |
Parameter required for measurement/calculation can be
set up in an internal memory by the each key on a panel.
These setup values are stored and recalled at the time
of restart. |
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Sampling time |
20 ms |
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Averaging |
Moving average:1 to 64 times |
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Interface |
RS-232C：Remote control of a main unit and transmission of
measurement data. The measurement data can be printed to
the DPU-414 printer (sold separately) |
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BCD output function
（option：CL-0120） |
Outputs any measurement result in BCD
format with 6-digit parallel.
Output method: Open collector
Output data: Display value can be selected from GAP-A,
GAP-B, THICK, A-B, and DISP2.
Data update time: 20 ms
Connection cable: AA-8207 (3 m, top end open) |
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Remote
function |
Remote operation of stop/start
calculation, thickness calibration from external.
■ Remote
terminals
Pin assignment and input/output signals |
| A |
Power supply |
5 to
24 VDC
When supplying at 6 VDC or higher from external,
insert a resistor. |
| B |
START |
Same
function as the START key |
| C |
STOP |
Deactivates the calculation mode. |
| D |
PAUSE |
Same
function as the PAUSE key. |
| E |
CALIB |
Calibration using data of reference piece of object
under measurement registered.
・Enabled only in conductor measurement.
・Thickness of the reference piece of object under measurement cannot be
changed. |
| F |
START STATUS |
Activated in the calculation mode and calculation
suspend mode. |
| G |
COMMON |
Connects at 0 V |
| H |
+5V
output |
Outputs at +5V （MAX：0.4 A） |
*Applicable connector:
R03-PB8M (TAJIMI ELECTRONICS CO., LTD) |
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SYNC function |
The multiple CL-5610/5610S units can
be performed with synchronized operation |
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Power requirement |
100 to 240 VAC 50/60 Hz |
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Operating environment (main
unit only) |
Temperature：＋23 to ±2 °C （with a guaranteed accuracy
range）, 0 to＋40°C （operating range）
Humidity：20 to 80 %R.H.（with no condensation） |
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Outer Dimensions |
210（W）×99（H）×276（D）mm （CL-5610/5610S main unit）
42.4（W）× 56（H）120（D）mm （Converter for CL-5610S） |
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Weight |
Approx. 4.5 kg （CL-5610/5610S main unit）
Approx 0.6 kg × 2 （Converter for CL-5610S） |
Option
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■
CL-0110 Outputs Function （Analog output, comparator
output） |
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Analog output |
The number of
terminals:3 （SENSOR A, SENSOR B, A-OUT)
●SENSOR A, SENSOR B
Output items：Outputs gap value of SENSOR A or SENSOR B.
Output voltage：5 V/F.S.（with [-5 to 0 V] offset
function）
Output accuracy：±0.25 %/F.S.（Accuracy is guaranteed only
for one sensor A or B).
Response frequency: DC to 4 kHz
●A-OUT
Output items：Selectable from THICK, GAP A, GAP B or A-B
Output voltage：-5 to 0 to +5 V
Output accuracy：±0.25 %/F.S
Output update time: 20 ms |
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Comparator Function |
The number of outputs：3 （COMP1,
COMP2, COMP3）
Output method： Open collector output
Setup value：Upper-limit or lower-limit value
Mode: Individual mode or ALL mode
●Individual mode: Using comparator 1/2/3 independently
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The comparator
contact output closes if condition “Upper-limit
setting (UPPER) < Measurement value” or
“Lower-limit setting (LOWER) > Measurement
value” is satisfied. |
●ALL mode: Using
comparator 1/2/3 for judgment of UPPER/OK/LOWER. |
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■
CL-0120 BCD Output Function |
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Output method |
6-digit parallel, BCD, open collector output |
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Output items |
Selectable from THICK, GAP-A, GAP-B. A-B, or DISP 2 |
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Data update time |
20 ms |
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Applicable cable |
AA-8207 (3 m, top end open) |
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■ CL-0200 High-resolution Measurement Function |
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The CL-0200 High-resolution Measurement Function
improves the resolution and linearity of the VE series. |
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■ CL-0210 High-impedance Grounding Mode |
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Measurement can be performed stably under the condition
with great grounding resistance. |
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■
CL-0300 Insulator Measurement Function |
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When the CL-0300
optional Insulator Measurement Function is installed,
the CL-5610/5610S allows measurement of insulators. |
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■ CL-015 Wafer slide table (made to order) |
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The CL-015 is a manual slide table that can be used
together with the CL-5610/5610S and VE-1520 Gap
Detectors to perform non-contact thickness measurement
of semiconductors or conductors such as silicon wafers.
Grooves have been provided in the table surface to
facilitate the use of vacuum adsorption tweezers.
Compatible wafer size: Diameter 100 to 150 mm
Thickness 0.1 to 1 mm
Note: Other special tables for 200-mm and 300-mm
wafers can also be made to order. |
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VE series Electrostatic Capacitance type Gap Detector |
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Standard type
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Model name |
VE-5010 |
VE-1020 |
VE-1520 |
VE-3020 |
VE-8020 |
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Measurement range（μm） |
50 to
500 |
100 to
1000 |
150 to
1500 |
300 to
3000 |
800 to
8000 |
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Measurement diameter
（mm）*1 |
φ6 |
φ8 |
φ10 |
φ20 |
φ40 |
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Cable length |
1.5 m （attached cable provided as standard） |
VL-1520/1521 cable（1.5m）(sold separately) |
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Temperature function |
k1＝1.7×10-5, k2＝3.4×10-5 |
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Operating temperature range
*2 |
0 to +80 °C |
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φ10mm Clamp shape type
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Model name |
VE-2011 |
VE-5011 |
VE-1021 |
VE-3021 |
VE-8021 |
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Measurement range（μm） |
20 to
200 |
50 to
500 |
100 to
1000 |
300 to
3000 |
800 to
8000 |
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Measurement diameter（mm）*1 |
φ3 |
φ6 |
φ8 |
φ20 |
φ40 |
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Cable length |
VL-1520/1521 cable （1.5m）, (sold separately) |
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Temperature function |
k1＝1.7×10-5, k2＝3.4×10-5 |
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Operating temperature range
*2 |
0 to +80 °C |
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*1 The surface measurement area of the
object under measurement must be larger than the
external diameter of the sensor.
*2 The operating temperature range is the temperature
range in which the sensor can operate, not the operating
range for which accuracy is guaranteed. The operating
range for which accuracy is guaranteed is at 23 ±2 °C.
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■ CL-0201 Measurement
Range Change option for the VE-5010/5011 |
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The measurement
range of the VE-5010/5011 can be changed from 20 to
200 μm by using the optional CL-0201. |
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Signal cables (sold separately)
| ●VL-1520
(straight --- straight) |
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| ●VL-1521
(right-angle --- straight ) |
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Revised: 2010/12/01
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