• At semiconductor plant, abnormal vibration during carrying conveyance between processes or in-process leads to damage of wafer in the conveyance. This application including the VC-2200 monitors vibration which is generated during carrying a conveyance by mounting a sensor (magnetic attachable/removal) on a measurement object conveyance and enables control such as stopping the carrying. It also can be used for monitoring of vibration other than carrying such as detecting crack of wafer in each process.
   
• The VC-2200 can be setup two kinds of frequency band and make Pass/Fail judgment of each band based on rms, peak values. Also it has the comparator delay time setting function and auto operation function. The comparator delay time setting function removes unwanted signal at the time of starting measurement and the auto operation function can control the timing of judgment by inputting control signal from external device such as PLC*.
   
• By connecting a pair of commercially sold headphones to the VC-2200, it is possible to make hearing check of vibrating sound. Moreover, it can be used instead of conventional stethoscopic probe. Output signals are provided for each band, enabling an observation for vibration phenomenon on each frequency band.

* PLC: Programmable Logic Controller