ONO SOKKI Application - Non-contact thickness measurement of electronic material such as silicon wafer with high accuracy

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Non-contact thickness measurement of silicon wafer

dimension E-1-1

Non-contact thickness measurement of electronic material such as silicon wafer with high accuracy

The CL-015 Wafer slide table: This is manual operating slide table in order to perform non-contact thickness measurement of conductive wafers such as silicon wafers. Grooves are provided on the table surface to facilitate use of vacuum adsorption tweezers.

<Measurable wafer’s size>
External diameter: 100mm to 150mm
Thickness: 0.1mm to 1mm (when used with VE-1520)

Please contact your nearest distributors or send an e-mail to us (overseas@ONO SOKKI.co.jp) when you are interested in the slide table for wafer more than 200mm to 300mm diameter.

	Product Brochures (PDF)
	Outer Dimensions (PDF)

Please send your questions and inquiries to: E-mail