The background vibration is greatly affected to the minute displacement measurement by the LV-2100 Laser Interference Displacement Meter with 0.155 nm resolution.

 

For example, when measuring the displacement of 50 nm, only around 1 µm of background vibration will disturb the measurement.

 

 

You need to identify the factor of background vibration to process the countermeasures.

 

 

Identify the factor of vibration source

Check the installation environment of the LV-2100.

 

 

 

Removing method of the vibration source

• Move or replace the vibration source from the table.
• Stop the operation of unnecessary devices on the floor.

 

Use of the vibration resistance table (Vibration isolation and reduction)

It is not easy to remove or stop the vibration source of the floor or inside the building. In this case, please use the vibration resistance table. Set the target object and the LV-2100 (sensor and main device) on the vibration resistance table.

 

Shift of the measurement time

Operate the measurement at midnight when the human activity is decreased. This has a great effect on reducing the background vibration from the outside.

 

Reinforcement and strengthening of the sensor suspending jig

Reinforcement and strengthening of the sensor suspending jig of the LV-2100 sensor. When there is Fine-positioning XY stage (LV-0015) or Fine-positioning Z stage (LV-0016) is attached to the LV-0030 Large size magnetic stand, it is effective to remove all of them. If alignment becomes difficult due to removing the stage, it enables to reduce the vibration of the suspending jig by connecting two units of the LV-0030.