DG-5100
The DG-5100 is a high-resolution gauge counter having integrated structure. This counter achieves input frequency at 3 MHz which is high speed of ten times compared to conventional counter. (equivalent to a spindle velocity of 1.2 m/s at GS-3800B series)
The DG-5100 provides various calculation functions as standard such as condition memory, range (MAX value – MIN value) display, and offset value setting. Up to three optional cards can be installed in combination to add following five functions.
1. Analog output function
2. BCD output function
3. Comparator function
4. RS-232C communication function
5. DC power supply functio
Features
Connection image
Gauge&Counter Connection table
(Click here)
(PDF 302KB)
Application
Dimensional measurement with high accuracy
The dimension of glass parts for laser instrument is checked by contact-type high accuracy linear gauge sensor at polishing process in order to ensure their accuracies on the way of process. After that, they are sent to the last process of optical testing.
Thickness measurement of silicon wafer with an accuracy of 0.5μm
The ST-0230 can be used for thickness measurement of small wafer less than 4-inch.
Thickness measurement of curved material such as silicon wafer with high accuracy
This example shows how to measure the thickness of curved plate material including silicon wafer with high accuracy. Specialized stand is used to prevent an influence of curve, which is designed to have convex lens where the measurement tip is hit, and four pins around the lens in order to hold up the curved plate material stably. Adjusting to fit the center of measurement tip for GS-3813 gauge sensor and convex lens, the thickness can be measured with less influence of curve.
Overview Specifications
| Applicable sensors | GS, BS series |
|---|---|
| Display | Fluorescent display tube, 7 digits |
| Measurement range | 0.0000 to ±99.9999*1 0.000 to ±999.999 0.00 to ±9999.99 mm |
| Input signal | Square wave, phase difference: 90° |
| External control input signal | Hold, reset |
| Power requirement | 100 to 240 VAC |
| Operating temperature range | 0 to +50 °C |
| Storage temperature range | -10 to +60 °C |
| Outer dimensions | 96(W)×48(H)×148(D) |
| Weight | Approx. 370 g |
| Accessory *2 | Instruction manuals |
*1: Counts up to 400,000. Higher values are available after when offset and factor values are set.
*2: Power cable is provided as an option.
Option
| Slot name | Function | Specification | Model name | |
|---|---|---|---|---|
POWER* |
AC power supply | 100 to 240 VAC (50/60 Hz) | standard | |
| DC power supply | DC 12~24 V ± 5 V | TM-0301 | option | |
| Ａ slot | Comparator output 3outputs |
1-make contact output (mechanical relay) |
TM-0340 | option |
| B slot* | BCD output | Output of BCD data with open collector (update time: 10 ms)7 digits parallel output |
DG-0522 | option |
| RS-232C | RS-232C function |
TM-0350 | option | |
| C slot | Analog output Voltage/current selection |
Output method: Selectable from voltage or current |
DG-0530 | option |
| D slot | Signal input | Usage for line driver, voltage signal (required conversion connector), power supply for sensor 5 V |
standard | |
| AX-2050N：Power supply cable with crimp-type terminals (AC power supply cable 3m)
AA-8901/8902/8903/8904: Signal extension cable for GS-3813/3830 gauge sensors AA-8910: Conversion cable AA-8801/8802/8803/8804: Signal extension cable for BS/GS series gauge sensors |
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*Either one of the two is available.
Interface
Revised:2020/07/02
