In semiconductor plant, introduction of advanced equipment is necessary for improving productivity and manufacturing new products. The equipment is so precise that the installation environment must be considered. The VR-6100 helps to find a way of installation or countermeasures to reduce vibration level by measuring floor vibration before a machine installation.

The floor vibration at semiconductor plant must be at 50 dB or less in general.

The VR-6100 can measure at low-amplitude vibration and evaluate floor vibration.